Awards per year
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SBIR Phase II: Physics-Guided AI Platform for Accelerating Extreme Ultraviolet (EUV) Mask Design
Lou, P. C. (PI)
09/01/25 → 08/31/27
Project: Research
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SBIR Phase I: An Artificial Intelligence System to Accelerate Semiconductor Production using Physics-embedded Lithographic Foundation Model
Lou, P. C. (PI)
02/15/24 → 05/31/25
Project: Research